Epitaxy System – ACCELERATOR 3500K

Description

The new ACCELERATOR 3500K is the first state-of-the-art high-performance production system for monocrystalline templates. Such templates are a key technology for the efficient mass production of products based on wide-bandgap semiconductors, LEDs, miniLEDs and microLEDs for displays and HEMTs and many other applications therefore benefit from the versatile advantages of the new ACCELERATOR 3500K.

• Ten times the capacity of conventional MOCVD or CVD/PVD systems
• Highest quality, homogeneity and reproducibility through high-precision production with innovative plasma technology
• 70 percent cost reduction compared to conventional processes
• Particle-free application due to vertical alignment of the substrate
• Maximum flexibility in the size and shape of the substrate