Epitaxy System – ENABLER 150K

Description


The ENABLER 150K is a revolutionary system for the production of monocrystalline bulk acoustic wave filters. For modern and future generations of mobile communications, polycrystalline materials are no longer sufficient to accommodate higher frequencies. The new epitaxy approach of ELEMENT 3—5 ensures a much more efficient production of future filter elements for telecommunications with numerous advantages.

• Significantly higher throughput compared to conventional machines
• Freedom of choice between AIN and AIScN
• Excellent homogeneity and reproducibility
• Higher manufacturing quality at lower costs
• Optimized energy use thanks to state-of-the-art intelligent plasma technology

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