>Tube#1 – Wet oxidation
>Tube#2 Silicon nitride LPCVD
– 12inch wafer, 50 wafers/batch (include dummy)
– 3-zone heater, max.1200?
-Quartz reactor + inner tube
-Quartz pedestal & boat up/down (motor)
-Dry pump
-Throttle valve + APC controller
-Heating mantle for H2O (3000cc)
-MFC: Tube#1 – O2(10slm),N2(10slm),O2(1slm)
-Tube#2 – DCS(1slm), NH3(1slm),
-N2(5slm), N2(500sccm)
– PC control
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Mail ID : info@hcptech.in
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CALL US : 080 6646 8218
Vertical LPCVD/Furnace System
HCP is driven by Six Essential Values that form the foundation of our company, holding it strong and resilient, much like the Hexagonal Close Packing unit cell.
GET IN TOUCH
ADDRESS:
31, 2nd Cross Rd, BOB Colony, JP Nagar 7th Phase, J. P. Nagar, Bengaluru, Karnataka 560078, India
CALL US :
080 6646 8218
Mail To :
info@hcptech.in
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