-Substrate size & load capacity
: -4inch wafer – 3 wafer/batch
– Source(gas) injection : Showerhead type
-Molded heater, Wafer temp. 400?, up/down
-RF power 600W 1ea
-Dry pump
– Throttle valve + APC controller
-MFC: He(1slm), N2(1slm), O2(100sccm),
-CF4(500sccm), NH3(100sccm), 10%SIH4-
90%Ar(500sccm)
-Loadlock
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Mail ID : info@hcptech.in
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CALL US : 080 6646 8218
PECVD / MOCVD System
HCP is driven by Six Essential Values that form the foundation of our company, holding it strong and resilient, much like the Hexagonal Close Packing unit cell.
GET IN TOUCH
ADDRESS:
31, 2nd Cross Rd, BOB Colony, JP Nagar 7th Phase, J. P. Nagar, Bengaluru, Karnataka 560078, India
CALL US :
080 6646 8218
Mail To :
info@hcptech.in
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