Wafer Bump 3D Vision Inspection

? Conduct with PASS Buffer when REWORK Part with Multiple NGs
? Function to start manufacturing with the REWORK Parts during
INSPECTION ATM Check
? Apply the LOAD PORT substitute loading system during UNLOADER PART
ATM inspection
? AIR CHUCK Works on Both 8-inch(200mm), 12inch(300mm) WAFER
? Users can output and monitor the designated DATA by Using the
self-developed SPC SW, such as data, defective images,
and charts.
? PEMTRON SMARTRON server system allows user to view and control each
device through one operation PC to monitoring the
operational status and SPC DATA of all equipment
? Using 3D Inspection Methodology to process the BUMP Inspection
? Reduce resources to check and debug the fault defects based on the
outstanding inspection precision