– Tube#1 – SiC epi. LPCVD (vertical tube)
Tube#2 LTO LPCVD (horizontal tube)
-2inch wafer, 2 wafers/batch
– Induction heater, max.1900?
-High frequency induction oscillator unit (60kW, 30kHz)
– Optical pyrometer
– Double quartz reactor (water cooling)
-Graphite susceptor up/down (motor)
– TMP + Dry pump
-Throttle valve + APC controller
-MFC: Tube#1 – SiH4, H2, C3H8, Ar, N2
-PC control
-
Mail ID : info@hcptech.in
-
CALL US : 080 6646 8218
Graphene / CNT/ NanoWire / SiGe / SiC CVD System
HCP is driven by Six Essential Values that form the foundation of our company, holding it strong and resilient, much like the Hexagonal Close Packing unit cell.
GET IN TOUCH
ADDRESS:
31, 2nd Cross Rd, BOB Colony, JP Nagar 7th Phase, J. P. Nagar, Bengaluru, Karnataka 560078, India
CALL US :
080 6646 8218
Mail To :
info@hcptech.in
Leave A Comment