-Substrate size & load capacity
: 4inch wafer – 1 wafer/batch
– Source(gas) injection : Showerhead type
-Molded heater, Wafer temp. 300?, up/down, rotation
-W wire + Temperature controller
-Dry pump
-Throttle valve + APC controller
– Bubbler(heating) 2set
-MFC: Vapor MFC for bubbler 1ea, N2(300sccm), Ar(300sccm,
2ea), O2(300sccm)
– Loadlock chamber
-PC control
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Mail ID : info@hcptech.in
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CALL US : 080 6646 8218
Hot Wire CVD System
HCP is driven by Six Essential Values that form the foundation of our company, holding it strong and resilient, much like the Hexagonal Close Packing unit cell.
GET IN TOUCH
ADDRESS:
31, 2nd Cross Rd, BOB Colony, JP Nagar 7th Phase, J. P. Nagar, Bengaluru, Karnataka 560078, India
CALL US :
080 6646 8218
Mail To :
info@hcptech.in
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