JetEtch IC Decapsulation

Dimensions
Etcher unit (mm/in) 290 h x 290 w x 419 d / 11.5 h x 11.5 w x 16.5 d
Bottle container, each unit (mm/in) 230 h x 110 w x 110 d / 9 h x 4.25 w x 4.25 d

Weight (kg/lbs)
17 / 38 (excluding bottle container and accessories)

Power
350 W @ 95 – 130 VAC or 350 W @ 210 – 250 VAC

CDA/N2 Requirements
CDA 4.2 kg/cm2 / 60 –100 psi
Nitrogen supply 2.8 lpm / 0.1 cfm

Etchants Available
Etchant volume: .1, .2, .5, 1-10mL/min for Pulse; 1-6mL/min for Vortex
Fuming nitric acid
Fuming sulfuric acid
Sulfuric acid (concentrated reagent grade)
Nitric : sulfuric acid mix 6:1, 5:1, 4:1, 3:1
Sulfuric : nitric acid mix 6:1, 5:1, 4:1, 3:1

Temperature Ranges
JetEtch Pro and CuProtect
Nitric acid (°C) 20 – 90
Sulfuric acid (°C) 20 – 250
Mixed acids (°C) 20 – 100

JetEtch Pro TotalProtect
Nitric acid (°C) 5 – 90
Sulfuric acid (°C) 5 – 150
Mixed acids (°C) 5 – 100
(mixed etchant range automatically calibrated to ratio selected)

Etching Time & Modality
(user selectable)
1 – 1800 seconds in 1.0-second increments
Pulse Etch mode, Vortex Etch mode
Program capacity: 100, user-defined, in nonvolatile memory

JetEtch Pro CuProtect and TotalProtect
Bias selection: 0.0 – 20 V in 0.1-V increments

JetEtch Pro TotalProtect
1 – 3600 seconds in 1.0-second increments
Program Daisy-chaining: combine multiple programs in succession without interrupting the etch process

Heat-up Time
(user selectable)
0 – 120 seconds in 1.0-second increments

Rinse Options
Nitric acid, sulfuric acid, no rinse

Reservoirs
500-mL or 1-litre bottles
33/38/40/45-mm cap sizes
4 bottles standard: 2 acid, 2 waste

Certifications
CE certification, SEMI S-2-93, SEMI S-2-2000

Accessories
All JetEtch Pro systems are supplied with a standard basic Accessory Kit. A wide range of Accessory Kits and custom-designed Monolithic Gaskets is available (contact Nisene for details).

Complete List of Accessory Kits
0300601 — DIP/SIP
0300602 — PLCC
0300603 — SOIC
0300604 — QFP
0300605 — BGA
0300606 — Die-Down BGA
0300609 — QFN/MLP
0300612 — Universal Accessory Kit

Installation
Installation in chemical fume hood required. 0.5 meters/sec minimum flow rate (100 surface ft/min).