Laser Liftoff

The VOLCANO® 100UV Laser Optics is built into a solid granite structure. The beam is homogenized into a 100mm long line beam with a typical width of 20 – 30µm. The FALCON 100UV projection lens assures a uniform line width and the large depth of focus which trouble-free production requires. A single TruMicro 8320 laser (200W, 10 kHz, 15-20ns) provides 20mJ pulse energy and gives an energy density of more than 400mJ/cm² in a 30µm FWHM line width, respectively the width can be expanded to 80µm for 150mJ/cm². Using a typical scan pitch of 50% of the FWHM the scan speed goes up to 400mm/s. Alternative laser sources operated at 355nm can be applied as well. However, the longer pulse duration of 50-70ns requires increased process energy density.