-Substrate size & load capacity
: 200mm*200mm glass – 1 cassette/batch
-Chemical bath(SUS316) 2ea
-QDR bath(PVDF) 1ea
-Sink bath(PP) 1ea
– Ultra sonic(40kHz,600W) 1ea
– DI generator
DI Resistivity : 17 ~ 18.2 ?/?
DI Productivity : 500LPH
-RO Tank : 650L
– PVC out plate
-Manual control (switch panel & PLC)
Wet Bench System
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- May 28, 2025
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